Low Energry Plasmas

Low-energy plasmas occupy a large portion of the density-temperature plane, with electron densities ranging from 105 to 1028 m-3 and electron temperatures ranging from 100 to 105 Kelvin. Two regimes in the density-temperature plane are characteristic of plasmas used in plasma processing. One of these includes glow discharges, in which the temperatures of electrons and heavy particles are widely disparate. The second includes thermal plasmas, in which electrons and heavy particles are in approximate thermal equilibrium. These plasmas are classical in nature in that the thermal kinetic energy is large in comparison to the average Coulomb interaction energy. Thus, charged particles usually interact weakly with each other, and electron collisions are usually most frequent with neutral atoms and molecules.

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