Plasma in Semiconductor Manufacturing and Microfabrication
This track covers plasma applications in the fabrication of integrated circuits and MEMS devices. Topics include dry etching, passivation, photoresist stripping, and atomic layer etching. Presenters will discuss challenges in achieving high precision and selectivity at the nanoscale. Advances in low-damage plasma processes for ultra-thin substrates will be highlighted. Plasma uniformity, contamination control, and etch profile accuracy will be addressed. The role of AI and real-time diagnostics in process control will be discussed. Attendees will gain insights into how plasma is enabling the next generation of micro- and nano-electronics.
Related Conference of Plasma in Semiconductor Manufacturing and Microfabrication
April 20-21, 2026
13th International Conference and Exhibition on Chromatography and Analytical Techniques
Rome, Italy
August 11-12, 2026
5th World Congress on Plasma Chemistry and Plasma Processing
Amsterdam, Netherlands
November 26-27, 2026
6th International Conference on Petrochemistry and Natural Gas
Amsterdam, Netherlands
Plasma in Semiconductor Manufacturing and Microfabrication Conference Speakers
Recommended Sessions
- Aerospace Applications and Plasma Propulsion
- Biomedical and Therapeutic Applications of Plasma
- Future Horizons and Emerging Trends in Plasma Technology
- Hybrid Plasma Systems and Multi-Modal Technologies
- Low-Temperature and Atmospheric Pressure Plasmas
- Plasma Chemistry and Reaction Mechanisms
- Plasma for Energy Conversion and Storage Systems
- Plasma for Environmental Remediation and Sustainability
- Plasma in Semiconductor Manufacturing and Microfabrication
- Plasma Nanotechnology and Nanomaterials Synthesis
- Plasma-Enabled Smart Sensors and Electronics
- Plasma-Surface Interactions and Engineering
- Industrial Plasma Applications and Commercialization Strategies
- Plasma Coatings for Corrosion and Wear Protection
- Plasma Diagnostics and Characterization Techniques
- Plasma for Textile and Polymer Processing
- Plasma in Additive Manufacturing and Smart Materials
- Plasma in Food Processing and Agricultural Technologies
- Plasma Policy, Safety Standards, and Regulatory Frameworks
- Plasma Processing in Photovoltaics and Energy Harvesting
- Plasma Reactor Design, Modeling and Scale-Up
- Plasma-Driven Catalysis and Green Chemical Synthesis
- Plasma-Enhanced Thin Film Deposition and Coatings
- Simulation and Digital Modeling of Plasma Processes
- Young Researcher Forum (YRF)
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