Simulation and Digital Modeling of Plasma Processes

This track dives into computational modeling and simulation of plasma systems. Topics include fluid dynamics, particle-in-cell (PIC) simulations, hybrid modeling, and plasma-material interaction models. Presenters will demonstrate how simulation supports reactor design, process control, and diagnostics interpretation. Emphasis will be on integrating machine learning and AI into predictive plasma modeling. Applications across PECVD, plasma etching, and plasma catalysis will be shown. This session supports collaboration between theorists, computational physicists, and process engineers. Attendees will explore how simulations accelerate innovation and reduce development cycles.

 

 

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